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Instrumentation, metrology, and standards for nanomanufacturing (29-30 August 2007, San Diego, California, USA)Postek, Michael T; Allgair, John.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-6796-6, 1Vol, various pagings, isbn 978-0-8194-6796-6Conference Proceedings